• Components for EUV and DUV lithography
  • Wafer Scanner
  • Depositing systems
  • High-vacuum pumps and valves
  • Components for high-power lasers (High-Power Ultra-Short-Wavelength)
  • Components for scientific measurement and analysis systems, e.g. gas chromatographs, electron scanning microscopes, mass spectrometers
  • Optical substrates like lenses, prisms, wafers, filters, masks,..
     
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